Semiconductor Solutions India

ATS + HIRATA – Semiconductor Automation Solutions

ATS has partnered with Hirata to bring advanced semiconductor automation solutions to India. By combining Hirata’s proven technology with ATS India’s engineering, manufacturing, integration and local support, the partnership helps meet the growing needs of the semiconductor industry.

Semiconductor Products

EFEM

The Equipment Front End Module integrates load ports, wafer-handling robots and control systems to transfer wafers between carrier pods and semiconductor process equipment.

Flexible System Configuration

Supports different combinations of load ports, robots and control systems.
Efficient Wafer Transfer

Provides smooth movement between carriers and process equipment.
Proven Handling Technology

Designed for demanding semiconductor manufacturing environments.
Customisable Integration

Layouts, motion patterns and communication interfaces can be configured for different applications.

Learn More

FOPLP Load Port

The FOPLP Load Port provides a controlled interface for loading and unloading panels between carriers and semiconductor processing equipment.

Proven Opening Technology

Supports secure and controlled carrier opening and closing.
Multiple Carrier Compatibility

Accommodates different carrier and panel configurations using interchangeable attachments.
Reliable Panel Mapping

Detects different panel types, including warped and thin panels.
SEMI Standards Compliance

Designed in accordance with applicable semiconductor equipment standards.

Learn More

PLP Panel Handling Robot

The PLP Panel Handling Robot provides smooth and stable panel transfer for advanced semiconductor packaging equipment.

Reliable Panel Handling

Enables controlled movement between different process stages.
Compact Configuration

Supports flexible equipment layouts while minimising the required footprint.
Simplified Integration

Integrated controls help reduce system components and simplify installation.
Flexible Cable Management

Supports clean, organised and reliable robot movement.

Learn More

Wafer Handling Robot

The Wafer Handling Robot provides fast, smooth and stable wafer transfer within semiconductor manufacturing equipment.

High-Speed, Low-Vibration Motion

Advanced motion control provides smooth and stable operation.
Improved Throughput

Optimised movement helps reduce wafer-transfer time.
Lightweight Design

Supports faster motion and efficient equipment operation.
Reduced Wiring System

Simplified connections enable easier integration with process equipment.